非均匀基底上三维薄膜生长的模拟研究

考虑原子在基底表面的扩散、沿岛周界的扩散和不同层间的扩散以及非均匀基底上表面吸附能分布的各向异性，建立起非均匀基底表面上原子扩散和三维薄膜生长的动力学蒙特卡罗模型.模拟得到在不同生长条件下出现的层状生长、岛状生长和混合生长三种生长模式和相应的多层薄膜生长形貌图.通过统计三维薄膜中原子在各层的分布，计算薄膜的表面粗糙度，得到薄膜生长模式与生长条件之间的关系. 关键词： 薄膜生长 非均匀基底 动力学蒙特卡罗模拟

Simulation of 3-dimensional thin film growth on heterogeneous substrate

A kinetic Monte Carlo model describing the three-dimensional thin film growth on heterogeneous substrates is presented, in which the diffusion of adatoms on substrates, along the island edges and between various layers, as well as the heterogeneity of adsorptive energy, are taken into account. Three growth modes, namely the Layer-by-layer mode, Stranski-Krastanovs mode and 3D mode, and the morphology of multiple layer growth of thin films are simulated. The relationship between thin film growth modes and growth conditions is established by taking into account the distribution of deposited atoms on various layers and the surface roughness of thin films.