用于位移传感器的全息平面变间距光栅设计与制作研究

简述了全息变间距光栅的几何理论.利用遗传算法对记录光路进行了优化计算，提出在目标函数中考虑记录参数误差的影响，推导了目标函数的积分形式，提高了计算效率.针对用于位移传感器的平面变间距光栅，分别计算了球面波干涉及球面波与非球面波干涉情况下的全息记录参数，给出了线密度误差曲线.制作出全息平面变间距光栅，并成功应用于位移传感器中. 关键词： 全息光栅 变间距光栅 遗传算法

Design and fabrication of holographic variable line-spacing gratings for position sensor

Variable line-spacing gratings are widely used in spacial spectroscopic and synchrotron radiation devices, but their design and fabrication are difficult. In this paper, the geometrical theory of aspheric wave-front recording optics is briefly reviewed. The genetic algorithm is introduced to optimize parameters of holographic variable line-spacing gratings. In order to improve the efficiency of calculation. the integral expression of the objective function is also derived. Design example of holographic variable line-spacing gratings for position sensor is given to demonstrate the capability of this method. Holographic variable line-spacing gratings with large density gradient are fabricated successfully.