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AlN/BN纳米结构多层膜微结构及力学性能
引用本文:喻利花,董师润,许俊华.AlN/BN纳米结构多层膜微结构及力学性能[J].物理学报,2008,57(12):7776-7782.
作者姓名:喻利花  董师润  许俊华
作者单位:江苏科技大学材料科学与工程学院,江苏省先进焊接技术重点实验室,镇江,212003
基金项目:国家自然科学基金(批准号:50574044)资助的课题.
摘    要:用射频磁控溅射法制备了AlN,BN单层膜及AlN/BN纳米多层膜.采用X射线衍射仪、高分辨率透射电子显微镜和纳米压痕仪对薄膜结构进行表征.分析表明:单层膜AlN为w-AlN结构,BN为非晶相.AlN/BN多层膜中BN的结构与BN层厚有关.当BN层厚小于0.55nm时,由于AlN层模板的作用,BN发生了外延生长,BN与AlN的结构相同;当BN层厚大于0.74nm时,BN为非晶.AlN/BN多层膜的硬度也与BN层的厚度有关.当BN层厚为1—2个分子层时,AlN/BN多层膜具有超硬效应;当BN层厚增加到0.74 关键词: AlN/BN多层膜 BN结构 超硬效应

关 键 词:AlN/BN多层膜  BN结构  超硬效应
收稿时间:2008-01-12
修稿时间:8/4/2008 12:00:00 AM

Microstructure and mechanical properties of AlN/BN nanostructured multilayers
Yu Li-Hua,Dong Shi-Run,Xu Jun-Hua.Microstructure and mechanical properties of AlN/BN nanostructured multilayers[J].Acta Physica Sinica,2008,57(12):7776-7782.
Authors:Yu Li-Hua  Dong Shi-Run  Xu Jun-Hua
Abstract:Monolithic AlN,BN films and AlN/BN multilayers were prepared by reactive magnetic sputtering. The films were characterized by X-ray diffraction, high-resolution transmission electron microscopy and nanoindentation. Results showed that the w-AlN phase and amorphous BN films structure exist in AlN and BN monolithic films. The crystal structure of BN layers in the multilayers depends on the thickness of BN layers. When the thickness of BN is less than 0.55nm, BN layers grew epitaxially with AlN under the influence of the “template effect" of w-AlN layers and form the same structure as AlN. When the thickness of BN is larger than 0.74nm, BN layers are amorphous. The hardness of AlN/BN multilayers also depends on the thickness of BN layers. When the thickness of BN is 1—2 molecular mono_layers, the superhardness enhancement of the multilayer is observed. The superhardness effect disappears when the thickness of BN is larger than 0.74nm. The critical thickness of BN layers marking the change from the crystalline to the amorphous structure has been calculated. The hardening mechanism of AlN/BN multilayers has been discussed. The main reason of the superhardness enhancement of the multilayer is the stress and modulus difference between the layers of BN and AlN.
Keywords:AlN/BN nano-multilayers  BN structure  superhardness effect
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