NiFeNb种子层对坡莫合金磁滞回线的影响

以NiFeNb为种子层，制备(Ni₇₉Fe₂₁)_1-xNb_{x(5nm)/(Ni79Fe21) (20nm)/Ta(3nm)系列膜，并对其颗粒大小、 磁滞回线及表面粗糙度等进行测量，探讨种子层中Nb含量x对坡莫合金磁滞回线的影响.结果 表明，以NiFeNb作种子层能更好地改善坡莫合金的微结构. Nb含量为23％时的磁滞回线有最 小的最大磁能积、矫顽力.种子层影响坡莫合金磁滞回线的一个重要原因是脱附激活能等因 素造成种子层具有不同的表面粗糙度，进而使坡莫合金具有不同的微结构和磁性能. 关键词： NiFeNb种子层 坡莫合金 磁滞回线 粗糙度}

Influence of NiFeNb seed layer on hysteresis loops of permalloy films

The(Ni₇₉Fe₂₁)_1-xNb_x(5nm)/(Ni_{79< /sub>Fe21) (20nm)/Ta(3nm) films are prepared with the (Ni79Fe21)1-xNbx seed layers. The grain size, hyste resis loops and surface roughness of samples are measured and the variations of hysteresis loops with the Nb atomic concentration in the seed layers are analyze d. The results show the microstructure of the permalloy films grown on the seed layers is improved. The coercivity and the (B·H)m in the hysteresis loop is minimal at x=23%.　The influence of seed layers on the hysteresis loops is partly duc to the different excitation energy of different seed layers, which result in different roughness of the surface of the seed layers film, hence the different microstructure of the permalloy films.}