图像复原式整形环形光横向超分辨共焦显微测量新方法

提出一种新的图像复原式整形环形光横向超分辨共焦显微测量法. 该方法首先利用二元光学器件，将高斯照明光束整形为环形光束，用于初步改善共焦显微镜的横向分辨力，然后利用基于最大似然估计法(maximum likelihood estimate, MLE)的单幅图像超分辨复原技术，重建测量图像的高频信息，来进一步改善共焦显微镜的横向分辨力. 实验表明,当λ=632.8nm，N.A. =0.85时，该方法能使共焦显微镜获得优于0.1μm的横向分辨力. 利用该方法建立的横向超分辨共焦显微系统除了具有显著的超分辨效果外 关键词： 超分辨 超分辨复原 最大似然估计 共焦成像

A confocal measurement method based on superresolution image restoration and shaped annular beam

A new confocal measurement method based on superresolution image restoration and shaped annular beam is proposed. Firstly, we employ a binary optical element (BOE) to shape a Gaussian beam into an annular beam which preliminarily improves the lateral resolution of a confocal microscopy system, then we use a superresolution image restoration technique based on the theory of maximum likelihood estimate (MLE) to retrieve the lost high frequency information of the testing image, which further enhances the lateral resolution. The experimental results indicate that a lateral resolution of better than 0.1μm is achieved when λ= 632.8nm and N.A.= 0.85. In addition to the distinct superresolution effect, the proposed method also has the advantage of low cost, therefore, it provides a novel technical way to improve the lateral resolution of a confocal microscopy system.