电子回旋共振氩等离子体中亚稳态粒子数密度及电子温度的测量

测量了电子回旋共振（ECR）氩等离子体中Ar的1s₅亚稳态粒子数密度，在气压 为02—0 8 Pa、功率为500—700W的范围内，利用吸收光谱法测量了Ar原子8115 nm谱线的吸收强 度，得到1s₅亚稳态粒子数密度为1×10¹⁵—4×10¹⁵ m ^-3.本文综合考 虑基态和1s₅亚稳态粒子的激发对Ar发射谱线强度的贡献后，用两条发射谱线强 度之比得 到电子温度.结果表明，计入了1s₅亚稳态激发的贡献后，所得到的电子温度与 只考虑基态的贡献得到的电子温度相比存在较大的差别. 关键词： 光谱法 亚稳态粒子数密度 电子温度 ECR等离子体源

Measurement of metastable state densities and electron temperatures in an electron cyclotron resonance argon plasma

The number of metastable state densities obtained ranges from 1×10¹⁵to 4×10¹⁵ m^-3 in the electron cyclotron resonance (ECR) argon plasma by measuring the optical absorption of the 8115 nm spectral line under the conditions of 02—08 Pa and 500—800 W. Taking into account the c ontribution of both the ground state and the 1s₅ metastable state to the emiss ions, the electron temperature T_e is measured by the ratio of emissio n lines. Results show that there are obvious differences compared with only considering t he metastable state densities.