扫描近场红外显微镜光纤探针的腐蚀制法

红外光探针是扫描近场红外显微镜(SNIM)中的关键部件,由于探针的种类和材料不同,制作的方法也不同.一般制作光纤探针有两种方法,即热拉伸法和化学腐蚀法.这里叙述了一种化学腐蚀方法,介绍了怎么去除砷硒碲中红外光纤的聚酰胺表层和硫化硒夹层,以及芯层腐蚀成针尖状的具体方法和过程,并对短锥针探针制法进行了探索.最后用此探针在近场范围内探测了氮化镓样品的自由电子激光(FEL)反射谱. 关键词： 扫描探针显微镜(SPM) 近场红外扫描显微镜(SNIM) 光纤探针

PREPARATION OF OPTICAL PROBES FOR SCANNING NEAR-FIELD INFRARED MICROSCOPY BY ETCHING METHOD

The infrared probe is the pivotal part of scanning near-infrared microscopy. The fabrication methods of it are different according to the different kinds of materials, most popular up to now is the adiabatic pulling of optical fibers during heating with CO₂ laser and afterwards chemical etching. In this paper, a method of etching is presented; how to deal with the polymer and to strip away the Se-S layer, and how to etch inner core into a high quality tip are introduced in details. The production of large cone angles and smooth probe is further studied, Finally, we use the Beijing free electron laser as light source, The spectrum signals of GaN varying with different wavelengths were detected and analyzed under the near field condition, and obtained the primary result.