退火气压对Bi3.25La0.75Ti3O12铁电薄膜的微观结构和铁电性能的影响

采用sol-gel法在Pt/TiO₂/SiO₂/p-Si(100)衬底上制备了Bi_3.25La_0.75Ti₃O₁₂(BLT)铁电薄膜，研究了在750 ℃时不同退火气压(p_{O2:10^-4—3 atm)对薄膜微观结构和电学性能的影响.XRD和拉曼光谱结果表明在10^-4和3 atm氧气压下退火 关键词： 3.25}La_0.75Ti₃O₁₂')" href="#">Bi_3.25La_0.75Ti₃O₁₂ 铁电性能 sol-gel法 正交化度

Effect of annealing pressure on the structure and ferroelectric properties of Bi3.25La0.75Ti3O12 thin films

The effect of annealing pressure on the structure and ferroelectric properties was investigated for Bi_3.25La_0.75Ti₃O₁₂(BLT) thin film prepared on Pt/TiO₂/SiO₂/p-Si(100) substrate by sol-gel method. The amorphous film samples were annealed at 750 ℃ for 30 min under oxygen pressures varying from 10^-4 to 3 atm. Then the structure, crystallization degree, and morphology were characterized by X-ray diffraction (XRD), Raman spectroscopy, and field-emission scanning electron microscope (FSEM) to clarify the effect of annealing pressure on the structure of the film. The XRD and Raman spectroscopy results showed a clear decreasing of the crystallization degree of the film annealed under oxygen pressures of 10^-4 and 3 atm. FSEM results showed different growth orientations of grains under different oxygen pressures. The structure of the BLT film was revealed to affect their ferroelectric properties. The largest remanent polarization of 17.8 μC/cm² with the coercive field of 73.6 kV/cm and good fatigue property were obtained for the film annealed under oxygen pressure of 0.1 atm.