退火对W/C周期性多层膜X射线衍射性能的影响

对W/C周期性多层膜的退火行为进行了精密X射线衍射测量,引入折射率修正,准确计算了多层膜的周期。观测到退火过程中多层膜周期变大的现象,同时二、三级Bragg衍射强度增大。用C层的密度下降对这些现象进行了解释。 关键词：

THE EFFECT OF ANNEALING ON THE X-RAY DIFFRACTION OF W/C PERIODIC MULTILAYERS

The behaviors of amorphous W/C periodic multilayers after annealing have been studied by precise low-angle X-ray diffraction. Afte refraction correction, the period of multilayers can be calculated more accurately using th low angle peaks. The period increases with increasing annealing temperatures. The intensities of 2nd and 3rd Bragg diffraction also increase with the annealing temperatures. These phenomena can be interpreted by the increase of thickness of the carbon layers.