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实验条件对纳米多孔SiO2薄膜结构及特性的影响
引用本文:吴广明,王珏,沈军,杨天河,张勤远,周斌,邓忠生,范滨,周东平,张凤山.实验条件对纳米多孔SiO2薄膜结构及特性的影响[J].物理学报,2001,50(1):175-181.
作者姓名:吴广明  王珏  沈军  杨天河  张勤远  周斌  邓忠生  范滨  周东平  张凤山
作者单位:(1)同济大学波耳固体物理研究所,上海200092; (2)中国科学院上海技术物理研究所,上海200083
基金项目:国家自然科学资金(批准号69978017,59802007),国家高技术惯性约束青年资金(批准号:ICF98-15),上海市科技发展资金(批准号:98JC14003)资助的课题. Project supported by the National Natural Science Foundation of China (Grant No.69978017,59802007).
摘    要:关键词

关 键 词:溶胶-凝胶技术  纳米多孔结构  实验条件  二氧化硅薄膜
修稿时间:2000年6月16日

EFFECT OF EXPERIMENTAL CONDITIONS ON THE STRUCTURE AND PROPERTIES OF NANO-POROUS SILICA FILMS
WU Guang-ming,WANG JUE,SHEN JUN,YANG Tian-he,ZHANG Qin-yuan,ZHOU BIN,DENG Zhong-Sheng,FAN Bin,ZHOU DONG-PING,ZHANG Feng-shan.EFFECT OF EXPERIMENTAL CONDITIONS ON THE STRUCTURE AND PROPERTIES OF NANO-POROUS SILICA FILMS[J].Acta Physica Sinica,2001,50(1):175-181.
Authors:WU Guang-ming  WANG JUE  SHEN JUN  YANG Tian-he  ZHANG Qin-yuan  ZHOU BIN  DENG Zhong-Sheng  FAN Bin  ZHOU DONG-PING  ZHANG Feng-shan
Abstract:The evolution of structure and properties of nano-porous silica films was investigated under different experimental conditions.A new method to adjust refractive index of the films rapidly and continuously is reported.The thin films were prepared with the base,acid one-step and base/acid two-step catalytic sol-gel processes and the dip-coating method.The structure and properties of the films were analyzed by atom force microscopy,scanning electron microscopy,X-ray photo electron spectroscopy,Fourier transform infrared,ellipsometry,separately.From the base one-step,the base/acid two-step,and the acid one-step catalytic process,silica particles in the films become small,the porosity decreases,and the refractive index increases continuously from 1.18 to 1.41.XPS analysis has shown Si2p peak shifts to a higher binding energy and near that of the silica bulk.The frequency shift of ω4 (transverse optical mode) of infrared absorption to a lower wave number indicates a decrease in the average Si-O-Si bridging angle.These results suggest that the effect of the above experimental conditions on properties of nano-porous silica films is attributed to the change of the silica structure of the films.
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