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基于等离激元多重杂化效应的光吸收结构
引用本文:杨帅,毛海央,鲍爱达,郭鑫,李锐锐,杨宇东,石梦,陈大鹏.基于等离激元多重杂化效应的光吸收结构[J].物理学报,2021(4):340-348.
作者姓名:杨帅  毛海央  鲍爱达  郭鑫  李锐锐  杨宇东  石梦  陈大鹏
作者单位:中北大学仪器与电子学院;中国科学院微电子研究所;江苏创芯海微科技有限公司
基金项目:国家自然科学基金(批准号:61771467);广东省重点领域研发计划(批准号:2019B010117001);中国科学院青促会项目(批准号:2018153)资助的课题.
摘    要:近年来,以聚合物为代表的高分子材料由于具有比其他光吸收材料(如半导体材料、碳基材料以及贵金属纳米材料)更好的柔性和粘弹性而受到广泛关注.本文基于等离子体再聚合技术和磁控溅射工艺在聚合物材料层上制备了具有等离激元多重杂化效应的光吸收结构,该结构具有宽谱高吸收特性.该结构的制备工艺简单易行,对不同聚合物材料具有通用性,在光学器件领域具有广泛的应用前景.

关 键 词:等离子体再聚合  复合纳米森林结构  光吸收结构  等离激元多重杂化

Light absorbing structures based on plasmon multi-hybrid effect
Yang Shuai,Mao Hai-Yang,Bao Ai-Da,Guo Xin,Li Rui-Rui,Yang Yu-Dong,Shi Meng,Chen Da-Peng.Light absorbing structures based on plasmon multi-hybrid effect[J].Acta Physica Sinica,2021(4):340-348.
Authors:Yang Shuai  Mao Hai-Yang  Bao Ai-Da  Guo Xin  Li Rui-Rui  Yang Yu-Dong  Shi Meng  Chen Da-Peng
Institution:(College of Instrumentation and Electronics,North University of China,Taiyuan 030051,China;Integrated Circuit Advanced Process Center,Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China;Jiangsu Hinovaic Technologies Co.,Ltd.,Wuxi 214001,China)
Abstract:In recent years,the polymers represented by macromolecular materials have attracted widespread attention due to their higher flexibility and viscoelastic,compared with other materials used for light absorption(such as semiconductor materials,carbon-based materials and noble metal nanomaterials).Although the polymers have shown potential applications in the photothermal field,compared with other light-absorbing materials,the polymer substrates have a low light absorption rate and a narrow absorption bandwidth concentrated in the visible light band.Therefore,it is necessary to prepare a structure on the polymer material layer for absorbing light,thereby improving the ability of the polymer to absorb light.In addition,since the existing preparation processes of polymer absorption structures require the use of templates and the processes are relatively complicated,there is an urgent need for a simple and easy process to prepare the absorption structures on the polymer material layer.In this article,composite nanoforests are prepared on polymer substrates based on a plasma repolymerization technology and magnetron sputtering process;due to the metallic nanoparticles existing,multi-hybrid plasmonic effect is achieved,thus the average light absorption rate of the polymer in a wavelength range of 380–2500 nm is increased from 23.34%to 74.56%.Such polymer composite nanoforests have high absorption characteristics in a wide spectral range.The method of preparing the structure is quite simple,and can be applied to preparing different polymer materials.Besides,by changing the plasma bombardment time,the morphology of the nanoforests can be adjusted;by increasing the size of the metallic nanoparticles,the absorption of the composite nanoforests can be increased.It is foreseeable that the polymer composite nanoforests will have applications in various optical devices.
Keywords:plasma repolymerization  composite nanoforests  light absorbing structures  plasmon multi-hybrid
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