| 非晶态多层膜和单层膜的低角X射线衍射研究 |
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| 引用本文： | 吴志强,吕向东,黄文勇,刘洪图,金怀诚,王昌燧,周贵恩,吴自勤.非晶态多层膜和单层膜的低角X射线衍射研究[J].物理学报,1987,36(5):591-598. |
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| 作者姓名： | 吴志强 吕向东 黄文勇 刘洪图 金怀诚 王昌燧 周贵恩 吴自勤 |
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| 作者单位： | (1)广东省韩山师范专科学校物理系,教师; (2)中国科学技术大学结构分析开放实验室; (3)中国科学技术大学物理系 |
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| 摘 要： | 本文对a-Si:H/(a-SiNx:H)非晶态周期多层膜和单层膜进行了低角X射线衍射研究。在周期数较少的多层膜衍射的布喇格衍射峰的低角侧发现了一系列次级衍射峰;在单层膜样品的低角衍射中也发现了一系列小峰。对此,我们提出了一个用于计算非晶多层膜和单层膜衍射强度的简单公式,使实验结果得到解释,并提出了一种测量膜厚的方法。
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| 收稿时间： | 6/9/1986 12:00:00 AM |
SMALL-ANGLE X-RAY DIFFRACTION STUDY OF AMORPHOUS MULTILAYER AND SINGLE LAYER THIN FILMS |
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| WU ZHI-QIANG,LU XIANG-DONG,HUANG WEN-YONG,LIU HONG-TU,JIN HUAI-CHENG,WANG CHANG-SUI,ZHOU GUI-EN and WU ZI-QIN.SMALL-ANGLE X-RAY DIFFRACTION STUDY OF AMORPHOUS MULTILAYER AND SINGLE LAYER THIN FILMS[J].Acta Physica Sinica,1987,36(5):591-598. |
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| Authors: | WU ZHI-QIANG LU XIANG-DONG HUANG WEN-YONG LIU HONG-TU JIN HUAI-CHENG WANG CHANG-SUI ZHOU GUI-EN and WU ZI-QIN |
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| Abstract: | Small-angle X-ray diffraction study of amorphous a-Si:H/(a-SiNx:H) periodical multilayer thin films and some single layer films has been undertaken. A number of satellite peaks were found in the lower side of Bragg diffraction peaks of multilayer thin films with a less number of periods. A number of diffraction peaks were also found for the small-angle diffraction of single layer films. We have presented a simple formula for calculating the X-ray diffraction intensity of multilayer and single layer films. A satisfactory explaination of experimental results was obtained. Consequently, a simple method for measuring the total thickness of both multilayer and single layer thin films has been presented. |
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