基于多孔氧化铝和单原子沉积技术的颜色调控方法研究

本文通过建立多孔氧化铝(porous alumina,PA)的物理模型及理论分析,提出与发展了一种基于PA和单原子沉积(atomic layer deposition,ALD)技术的颜色调控新方法.以实验制备的PA样品为原型,对孔径相同、孔中心距相同但孔深不同的一系列PA模板进行了颜色调控的仿真,揭示了调控色随孔深变化的规律;通过控制在草酸溶液中的阳极氧化时间,实验制备出平均孔径40 nm、平均孔中心距100 nm、孔深分别为296 nm和373 nm的两个PA样品;之后采用ALD技术在它们表面均沉积一层 关键词： 多孔氧化铝 颜色调控 单原子沉积

A method of color modulation based on porous alumina and atomic layer deposition

By modeling and analyzing porous alumina (PA), a method to modulate the colors of PA templates is proposed, which is based on the preparation of PA templates and the atomic layer deposition (ALD) technique. Referring to the experimentally prepared PA samples, theoretical simulations are carried out for a series of PA templates with the same hole-diameter and hole-interval, but with different hole-depths. The relationship between the modulated colors and the hole-depths are thus disclosed. By controlling the time of anodization in oxalic acid^solution, two PA samples with different hole-depths (296 nm and 373 nm) were prepared, both with an average hole-diameter of 40 nm and an average hole-interval of 100 nm, respectively. ALD processing is then applied to deposit a layer of Fe₂O₃ film with total thickness of 16.8 nm on these samples. It was experimentally observed that the processed PA samples show different colors which change with hole-depths. The experimental results are in good agreement with the theoretical simulations, which proves the feasibility of color modulation with this method.