多层光学薄膜矢量散射的理论与实验研究

本文提出一种用以计算多层光学薄膜的矢量散射波场分布的新方法。并应用统计学原理,详细讨论了不同膜层界面的互相关模型及相应的光学薄膜散射特性。推导中应用了薄膜光学的惯用概念,所得公式亦比较简洁。还实验测量了光学薄膜的散射波场分布,并根据所建立的模型确定了所测光学薄膜的界面互相关特性。 关键词：

VECTOR SCATTERING THEORY AND EXPERIMENTS FOR MULTILAYER OPTICAL COATINGS

A new method is presented for predicting the distribution of vector scattered fields of multilayer optical coatings. The scattering properties of film stacks with various interface cross-correlation models are discussed according to the statistical principles. The theory has been related to the familiar concepts of thin film optics, and simple results are obtained. It is shown theoretically that even though the optical parameters of the multilayer optical coatings are the same, the scattering losses can be quite different due to the different interface cross-correlations. Measurements of the scattered field distribution of optical films have also been made, and from them the interface cross-correlations of the multilayer optical films are determined according to the vector scattering theory.