扫描光声显微镜

本文简单叙述了扫描光声显微镜的原理、应用、发展以及我们现阶段的研制成果,光声信号可以用振幅或相位接收的方式成象,分辨率达到4.5μm,从已获得叉指换能器,集成电路以及材料亚表面结构等样品的光声象可以说明这种显微镜技术在固体物理、材料科学,甚至医学上均具有重要的应用前景。 关键词：

SCANNING PHOTOACOUSTIC MICROSCOPY

The principle, possible applications and prospects of the scanning photoacoustie microscopy are described briefly. The microscopy system presented herewith attains a resolution of about 4,5 μm. Some images of such samples as the interdigital transducer of surface acoustic wave, integrated circuit and in particular the subsurface structure of the materials have been obtained by measuring the amplitude or the phase angle of the photoacoustie signal. These preliminary results show the potential applications of this device in solid state physics, material science and even medical science.