| SrTiO3同质外延过程中的反射高能电子衍射图案分析 |
| |
| 引用本文： | 魏贤华,张 鹰,李金隆,邓新武,刘兴钊,蒋树文,朱 俊,李言荣.SrTiO3同质外延过程中的反射高能电子衍射图案分析[J].物理学报,2005,54(1):217-220. |
| |
| 作者姓名： | 魏贤华 张 鹰 李金隆 邓新武 刘兴钊 蒋树文 朱 俊 李言荣 |
| |
| 作者单位： | 电子科技大学,微电子与固体电子学院,成都 610054 |
| |
| 摘 要： | 在激光分子束外延实验中,用RHEED原位监测了SrTiO3基片初始、退火以及同质外延过程中的表面形态.通过对RHEED图案分析,获取了表面面内的晶格常数振荡与衍射条纹的半高宽振荡现象,前者是由退火重构表面与薄膜之间的界面造成的,后者与二维岛边界的弛豫相关.另外还观察到了等离子体对入射电子束的影响而导致的RHEED强度振荡行为的相位移现象.
关键词：
反射高能电子衍射
SrTiO3
表面晶格常数及衍射强度振荡
|
| 关 键 词： | 反射高能电子衍射 SrTiO3 表面晶格常数及衍射强度振荡 |
| 收稿时间： | 4/7/2004 12:00:00 AM |
Analysis of reflection high-energy electron diffraction pattern during SrTiO3 homoepitaxy |
| |
| Wei Xian-Hu,Zhang Ying,Li Jin-Long,Deng Xin-Wu,Liu Xing-Zhao,Jiang Shu-Wen,Zhu Jun and Li Yan-Rong.Analysis of reflection high-energy electron diffraction pattern during SrTiO3 homoepitaxy[J].Acta Physica Sinica,2005,54(1):217-220. |
| |
| Authors: | Wei Xian-Hu Zhang Ying Li Jin-Long Deng Xin-Wu Liu Xing-Zhao Jiang Shu-Wen Zhu Jun and Li Yan-Rong |
| |
| Abstract: | SrTiO 3 surface was monitored in-situ by reflection high-energy electron diffraction(RHEED) during annealing and homoepitaxial growth in laser molecular beam epitaxy(LMBE). By analyzing RHEED pattern,we show the oscillation behavior of in-plane lattice constant and full-width at half maximum (FWHM) of diffraction streaks; the former is due to the interface between the annealed reconstruction surface and the growing film,and the origin of the latter is related to the relaxation of 2D islands by their edges. In addition,the phase shift of RHEED intensity oscillation was observed,due to plasma influence on the incident electron beam. |
| |
| Keywords: | RHEED SrTiO 3 oscillation of surface lattice constant and diffraction intensity |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《物理学报》浏览原始摘要信息 |
| 点击此处可从《物理学报》下载免费的PDF全文 |
|
