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离子溅射的微区叠加原理
引用本文:王震遐.离子溅射的微区叠加原理[J].物理学报,1994,43(1):161-168.
作者姓名:王震遐
作者单位:中国科学院上海原子核研究所
基金项目:国家自然科学基金资助的项目.
摘    要:荷能离子轰击固体表面在往使表面产生特定的结构,因而改变溅射总产额和微分产额。这些变化是由于表面结构改变而引起的几种效应,例如弹离子入射角、形貌对发射粒子的屏蔽以及合金表面元素按微区局域富集等的影响而产生的,本文发展了一种考虑上述诸效应的理论方法,并详细讨论该方法在元素(Cd)和合金(AlxSn100-x)靶实验微分产额方面的应用。 关键词

关 键 词:离子  溅射  微区叠加原理  角分布
收稿时间:9/7/1992 12:00:00 AM

A PRINCIPLE FOR MICRO-REGION SUPERPOSITING OF ION SPUTTERING
WANG ZHEN-XIA.A PRINCIPLE FOR MICRO-REGION SUPERPOSITING OF ION SPUTTERING[J].Acta Physica Sinica,1994,43(1):161-168.
Authors:WANG ZHEN-XIA
Abstract:Solid surfaces subjected to energetic ion bombardment generally develop chara-cteristic structures, which may significantly change total and differential sputtering yields. The change is due to several competing effects, for instance, change of the effective projectile incidence angle, recapture of obliquely ejected particles (shadow effect), and element local-enrichment in different micro-region on the alloy surface. From these, we have now developed an efficient new theoretical method for covering all of the above effects exactly. This method and its application to the analysis of experimental results of element (Cd) and alloy system (AlxSn100-x)targets are de-scribed in detail.
Keywords:
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