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隔离层厚度和盖层厚度对InAs/GaAs量子点应变分布和发射波长的影响
引用本文:刘玉敏,俞重远,任晓敏.隔离层厚度和盖层厚度对InAs/GaAs量子点应变分布和发射波长的影响[J].物理学报,2009,58(1):66-72.
作者姓名:刘玉敏  俞重远  任晓敏
作者单位:(1)北京邮电大学,理学院,北京 100876;光通信与光波技术教育部重点实验室(北京邮电大学),北京 100876; (2)光通信与光波技术教育部重点实验室(北京邮电大学),北京 100876
基金项目:国家重点基础研究发展计划(973)项目(批准号:2003CB314901),国家自然科学基金(批准号: 60644004) 和高校创新引智计划项目(批准号:B07005)资助的课题.
摘    要:分析了量子点盖层生长过程中隔层厚度对应变分布的影响,指出隔层材料的纵向晶格常数与量子点材料的纵向晶格常数对应变分布具有重要意义.定性说明了应变因素在隔离层生长过程中对量子点高度塌陷产生的影响.讨论了当隔离层顶面与量子点高度持平后,增加盖层厚度对应变分布的影响.基于变形势理论,讨论了上述几何参数的变化对发光波长的影响,并与实验结果进行了对比.结果表明,在量子点加盖过程中,应变因素对其形貌和发光特性具有重要作用,以应变工程为基础的发射波长调控是拓展量子点波长发射范围的有效途径. 关键词: 应变工程 半导体量子点 隔离层 盖层

关 键 词:应变工程  半导体量子点  隔离层  盖层
收稿时间:2008-05-31
修稿时间:7/1/2008 12:00:00 AM

Effects of the thickness of spacing layer and capping layer on the strain distribution and wavelength emission of InAs/GaAs quantum dot
Liu Yu-Min,Yu Zhong-Yuan,Ren Xiao-Min.Effects of the thickness of spacing layer and capping layer on the strain distribution and wavelength emission of InAs/GaAs quantum dot[J].Acta Physica Sinica,2009,58(1):66-72.
Authors:Liu Yu-Min  Yu Zhong-Yuan  Ren Xiao-Min
Abstract:A systematic investigation is given about the influence of thickness of the spacing layer on the strain distribution during the capping stage of the quantum dot. The calculated results show that the mismatch between the lattice constant of the spacing layer along the growth direction and that of the quantum dot is very important for the the strain distribution. The height of the quantum dot is compressed during the capping stage, which is qualitatively interpreted form the strain distributions. When the thickness of the spacing layer equals the quantum dot, the influence of thickness of the capping layer on strain distribution is also discussed. Based on the deformation potential theory, the dependence of the emission wavelength on the thickness of the capping layer is investigated. The calculated results agree well with the experiment results. We conclude that, during the capping stage of the quantum dot, the strain is very critical for both the shape of the quantum dot and the optical characteristics; extension of the emission wavelength via quantum dot strain engineering is an effective means.
Keywords:strain engineering  semiconductor quantum dot  spacing layer  capping layer
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