TiN/SiC纳米多层膜的生长结构与力学性能

研究了TiN/SiC纳米多层膜中立方SiC（B1cubic SiC）的形成及其对TiN/SiC多层膜力学性能的影响.结果表明：在TiN/SiC多层膜中，非晶态的SiC层在厚度小于0.6nm时形成立方结构并与TiN形成共格外延生长的超晶格柱状晶，使多层膜产生硬度和弹性模量显著升高的超硬效应，最高硬度超过60GPa.SiC随着层厚的增加转变为非晶相，从而阻止了多层膜的共格外延生长，使薄膜呈现TiN纳米晶和SiC非晶组成的层状结构特征，同时多层膜的硬度和弹性模量下降.TiN/SiC纳米多层膜产生的超硬效应与立方 关键词： 立方碳化硅 TiN/SiC纳米多层膜 外延生长 超硬效应

Growth structure and mechanical properties of TiN/SiC nano-multilayers

The formation of cubic SiC(B1 cubic SiC) and its effect on the mechanical properties of TiN/SiC nano multilayers were studied in this work. The results show that in TiN/SiC mulytilayer, SiC exists as a cubic structure and forms coherent epitaxially grown columnar crystal superlattice with TiN when the thickness of SiC layer is about 0 6nm. Multilayers show the superhardness effect with the enhancement of hardness and elastic modulus, and the highest hardness excess 60GPa. With the increase of SiC layer thickness, B1 SiC transforms into amorphous phase and impedes the coherent epitaxial growth of multilayers. Multilayers present layer structure character composed of TiN nanocrystal and amorphous SiC. Correspondingly, the hardness and elastic modulus of multilayers decrease. The formation of cubic SiC and coherent growth structure of cubic SiC and TiN appear to be likely the origin of the superhardness effect of TiN/SiC nano-multilayers.