溅射氧化铁薄膜矫顽力的研究

本文报道了有关溅射氧化铁薄膜磁性能的系统研究,特别着重于矫顽力的温度依赖关系和矫顽力随不同氧化铁相的变化。从理论分析与实验测量结果的对比中,给出了形状各向异性、磁晶各向异性及应力各向异性各自对Fe₃O₄薄膜、γ-Fe₂O₃薄膜及二者混合相薄膜的贡献,并且得到了Fe₃O₄薄膜和γ-Fe₂O₃薄膜的磁晶各向异性常数K₁的温度依赖关系曲线。 关键词：

STUDY ON THE COERCIVITY OF RF SPUTTERED IRON OXIDE THIN FILMS

The study on magnetic properties of RF sputtered iron oxide thin films was carried out systematically. More specifically, the temperature dependence (77-500 K) of the coercivity and the variation of coercivity with different iron oxide phases such as the as-sputtered Fe₃O₄, partially transformed Fe₃O₄/(γ-Fe₂O₃), and γ-Fe₂O₃, were investigated. Comparing the theoretical analyses with the experimental results, the contributions to the coercivity from shape anisotropy, magnetocrystalline anisotropy, and stress-induced magnetic anisotropy were obtained separately. And the first-order crystalline anisotropy constant K₁ vs. temperature for Fe₃O₄ and γ-Fe₂O₃ films was derived from M_s(T) and H_c(T) over the temperature range of 100-500 K.