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离子轰击引起的表面形貌对Ag的溅射产额的影响
引用本文:潘冀生,王震遐,陶振兰,章骥平,张慧明,赵烈.离子轰击引起的表面形貌对Ag的溅射产额的影响[J].物理学报,1991,40(12):2018-2023.
作者姓名:潘冀生  王震遐  陶振兰  章骥平  张慧明  赵烈
作者单位:(1)杭州大学中心实验室,杭州,310028; (2)中国科学院上海原子核研究所,上海,201800
基金项目:国家自然科学基金资助的课题
摘    要:用捕获膜技术和卢瑟福背散射(RBS)谱仪测定Ag靶在27keV Ar+离子轰击下的溅射原子角分布,从而确定不同剂量下Ag的溅射产额,并对其靶点表面形貌进行扫描电子显微镜(SEM)观察。结果发现,所有的角分布都呈over-cosine形状,但其溅射产额却随着表面形貌不同而不同。根据溅射产额Y与轰击离子入射角φ变化关系,讨论不同轰击剂量下溅射产额的差别,肯定了表面形貌是影响溅射产额的一个重要因素,并由此提出“表观产额”的新概念。 关键词

关 键 词:离子轰击  表面形貌  Ag  溅射产额
收稿时间:1/3/1991 12:00:00 AM

INFLUENCE OF SURFACE TOPOGRAPHY ON THE SPUTTE RING YIELDS OF SILVER
PAN JI-SHENG,WANG ZHEN-XIA,TAO ZHEN-LAN,ZHANG JI-PING,ZHANG HUI-MING and ZHAO LIE.INFLUENCE OF SURFACE TOPOGRAPHY ON THE SPUTTE RING YIELDS OF SILVER[J].Acta Physica Sinica,1991,40(12):2018-2023.
Authors:PAN JI-SHENG  WANG ZHEN-XIA  TAO ZHEN-LAN  ZHANG JI-PING  ZHANG HUI-MING and ZHAO LIE
Abstract:The angular distributions and yields of silver atoms sputtered from a Ag sample have been measured using collector technique and RBS analysis. The Ag target was sputtered at normal incidence with 27keV Ar+ ions. The irradiated surface was examined by scanning electron microscopy. It was found that all the angular distributions were over-cosine with different irradiation dose, but the sputtering yields were dose-dependent. The experimental result can be explained with surface topography and sputtering yield as a fuction of the angle of incidence. It is found that surface topography seems to be an important factor to influence sputtering yield. a new concept, namely "apparent yield", is presented.
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