离子能量和沉积温度对离子束沉积碳膜表面形貌的影响

利用质量分离的低能离子束沉积技术,得到了非晶碳膜.所用离子能量为50—200eV,衬底温度从室温到800℃.在沉积的能量范围内,衬底为室温时薄膜为类金刚石,表面非常光滑;而600℃下薄膜主要是石墨成分,表面粗糙.沉积能量大于140eV,800℃时薄膜表面分立着高度取向的、垂直衬底表面、相互平行的开口碳管.用高分辨电子显微镜看到了石墨平面的垂直择优取向,离子的浅注入和应力是这种优先取向的主要机理. 关键词： 非晶碳 表面形貌 质量分离低能离子束

INFLUENCE OF ION ENERGY AND DEPOSITION TEMPERATURE ON THE SURFACE MORPHOLOGY OF CARBON FILMS DEPOSITED BY ION BEAMS

Carbon films were deposited by mass-selected ion beam technique with ion energies 50—200eV at a substrate temperature from room temperature to 800℃. For the energies used, smooth diamond-like carbon films were deposited at room temperature. When the substrate temperature was 600℃,rough graphitic films were produced. But highly oriented carbon tubes were observed when the energies were larger than 140eV at 800℃. They were perpendicular to the surface and parallel to each other. Preferred orientation of graphite basic plane was observed by high-resolution electron microscopy. Shallow ion implantation and stress are responsible for this orientation.