氢的强化刻蚀对金刚石薄膜品质的影响与sp2杂化碳原子的存在形态

用化学气相沉积方法制备了金刚石薄膜.在制备过程中，通过间歇式关闭甲烷气体，强化了氢对sp2杂化碳原子的刻蚀.用拉曼光谱和金相显微镜对薄膜进行了分析表征.结果表明，氢对sp2杂化碳原子的强化刻蚀并未影响金刚石薄膜的品质和微观结构.这一结论说明，在金刚石薄膜中，sp2杂化碳原子主要存在于金刚石晶粒表面和晶界碳原子之间,而不是以石墨或无定形碳颗粒为主要存在方式. 关键词： 化学气相沉积 金刚石薄膜 拉曼光谱 强化刻蚀

Influence of hydrogen-enhanced etching on the quality of diamond films and the existing form of sp2 bonding carbon atoms

Diamond thin films were prepared by using chemical vapor deposition. It is enhanced to etch the sp2 bonding carbon atoms of the film by intermittently closing the methane gas during the deposition. These films were characterized by Raman spectroscopy and microscopy. The results show that the enhanced etching of sp2 bonding carbon atoms has no obvious effect on quality and microstructure of the diamond films. It reveals that the sp2 bonding carbon atoms do not mainly exist in graphitic or amorphous carbon grain form in the films but mainly among the carbon atoms of diamond grain surface or grain boundary.