化学汽相沉积法生长微晶过程中的旋涡现象

本文报道了用高分辨电子显微术(HREM)观察辉光放电汽相淀积制备的Si:H薄膜,和热化学气相合成法制备的超细SiC粉末时发现的原子密排面呈旋涡状排列的旋涡现象,描述了这种旋涡现象的结构特点,分析了旋涡结构的形成原因,及其能保留下来的条件,讨论了这种旋涡现象与微晶形核生长过程的联系。 关键词：

WHIRLPOOL STRUCTURE IN THE PROCESSES OF MICROCRYSTAL GROWTH BY CVD METHODS

The whirlpool structure have been observted in HREM investigation of Si : H films deposited by glow discharge and SiC ultrafine powder synthesized by thermal chemical vapor reaction method. In this structure, strong planes are arranged around its nuclei and this seems to be whirlpools in HREM image. In this article, the cheracters of whirlpool structure are described, its forming reason and the condition under which it can be retained are analysed, and the dependence of it on microcrystal nucleation and growth processes are discussed.