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磁性隧道结热稳定性的x射线光电子能谱研究
引用本文:冯玉清,赵昆,朱涛,詹文山.磁性隧道结热稳定性的x射线光电子能谱研究[J].物理学报,2005,54(11):5372-5376.
作者姓名:冯玉清  赵昆  朱涛  詹文山
作者单位:(1)聊城大学物理与信息工程学院磁电子实验室,聊城 252059; (2)中国科学院物理研究所磁学国家重点实验室,北京 100080
基金项目:国家自然科学基金(批准号:50171078和50471054)资助的课题.
摘    要:通过XPS等微观分析手段证实了磁性隧道结在高温退火后,反铁磁层中的Mn元素扩散到被钉 扎铁磁层及势垒层中,破坏了势垒层/铁磁层界面,从而导致了磁性隧道结高温退火后TMR的 下降.然而在反铁磁层和被钉扎铁磁层之间插入一层纳米氧化层后,Mn的扩散得到了抑制, 使磁性隧道结的热稳定性得以提高. 关键词: 磁性隧道结 纳米氧化层 x射线光电子能谱

关 键 词:磁性隧道结  纳米氧化层  x射线光电子能谱
文章编号:1000-3290/2005/54(11)/5372-05
收稿时间:03 15 2005 12:00AM
修稿时间:2005-03-152005-04-13

Thermal stability of magnetic tunnel junctions investigated by x-ray photoelectron spectroscopy
Feng Yu-Qing,Zhao Kun,Zhu Tao,Zhan Wen-Shan.Thermal stability of magnetic tunnel junctions investigated by x-ray photoelectron spectroscopy[J].Acta Physica Sinica,2005,54(11):5372-5376.
Authors:Feng Yu-Qing  Zhao Kun  Zhu Tao  Zhan Wen-Shan
Institution:1.State Key Laboratory of Magnetism, Institute of Physics, Chinese Academy of Sciences, Beifing 100080, China; 2.Magnetoelectronics Laboratory, School of Physics Science and Information Technology, Liaocheng University, Liaocheng 252059, China
Abstract:We have studied the thermal stability of magnetic tunnel junctions with and without nano-oxide layer (NOL) using x-ray hpotoelectron spectroscopy (XPS). The con centration and chemical states of elements,in particular Mn,have been obtained b y angel-resolved XPS and peak decomposition technique.It is confirmed that Mn in the antiferromagnetic layer can diffuse into the pinned ferromagnetic layer and the insulating barrier layer when a magnetic tunnel junction without NOL is ann ealed at high temperature.However,the interdiffusion of Mn during the annealing process is suppressed by inserting a NOL between the antiferromagnetic and pinne d ferromagnetic layer,and then the thermal stability is improved.
Keywords:magnetic tunnel junction  nano-oxide layer  x-ray photoelectron spe ctroscopy
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