非晶态WO3薄膜电致变色特性的研究

采用射频溅射三氧化钨粉末靶的技术，在不同的氧分压条件下沉积得到非晶态WO3电致变色薄膜，分析得知氧分压为1∶10的样品变色性能更好些.采用x射线衍射(XRD)，原子力显微镜(AFM)，伏安特性曲线和分光光度计分析所制备薄膜的特性.将薄膜在15mol/L的LiClO4的丙稀碳酸脂（PC）溶液进行电化学反应.发现氧分压在1∶10的情况下沉积得到的薄膜呈非晶态，薄膜有较多的孔隙，这有利于Li+的抽取，进而显示出很好的变色性能.x射线光电子能谱(XPS)成分分析表明WO3薄膜在原态中只有W和O两种原子电色反应后 关键词： 三氧化钨薄膜 非晶 射频溅射 电致变色

Study on electrochromic performances of amorphous WO3 films

A series of WO3 films are prepared by rf-sputtering under different partial pressures of oxygen. It is found that the films with oxygen partial pressure ratio 1∶10 have better electrochronic(EC) properties than others. Microstructural and compositional characteristics of WO3 films are studied by x-ray diffraction, atomic force microscopy and x-ray photo electro spectroscopy. It is obvious that the samples are amorphous and have more pores that are beneficial for Li+ to inject and eject. The original-state films are composed of tungsten and oxygen. After electrochemical reactions， the main component becomes LixWO3 in which tungsten ions normally exhibit both W6+ and W5+ oxidation states. The films are annealed in air at 230 and 400℃ for 90 min. The cyclic voltammograms and optical transmittance show that the films annealed at 400℃ after more than 10 cycles present better EC properties.