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辉光放电聚合物结构及力学性质研究
引用本文:何智兵,阳志林,闫建成,宋之敏,卢铁城.辉光放电聚合物结构及力学性质研究[J].物理学报,2011,60(8):86803-086803.
作者姓名:何智兵  阳志林  闫建成  宋之敏  卢铁城
作者单位:1. 中国工程物理研究院激光聚变研究中心,绵阳 621900; 2. 四川大学物理科学与技术学院,成都 610065
摘    要:采用低压等离子体聚合技术,通过调整工作气压和反式二丁烯(T2B)与H2流量比制备了辉光放电聚合物(GDP)涂层. 利用傅里叶变换红外吸收光谱和元素分析法讨论了工作气压和T2B与H2流量比对GDP涂层内部H原子含量及结构的影响,并且通过纳米压痕技术对GDP涂层的硬度及杨氏模量进行了表征.研究结果表明:降低工作气压和T2B与H2流量比,GDP涂层内sp3 C 关键词: 傅里叶变换红外光谱 纳米压痕 杨氏模量 硬度

关 键 词:傅里叶变换红外光谱  纳米压痕  杨氏模量  硬度
收稿时间:2010-06-25

Structure and mechanical property of glow discharge polymer
He Zhi-Bing,Yang Zhi-Lin,Yan Jian-Cheng,Song Zhi-Min and Lu Tie-Cheng.Structure and mechanical property of glow discharge polymer[J].Acta Physica Sinica,2011,60(8):86803-086803.
Authors:He Zhi-Bing  Yang Zhi-Lin  Yan Jian-Cheng  Song Zhi-Min and Lu Tie-Cheng
Institution:Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China;Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China; College of Physical Science and Technology, Sichuan University, Chengdu 610065, China;Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China;College of Physical Science and Technology, Sichuan University, Chengdu 610065, China;College of Physical Science and Technology, Sichuan University, Chengdu 610065, China
Abstract:Different glow discharge polymer (GDP) thin-films are prepared at various working pressures and flux ratios of trans-2-butune (T2B) to H2 by using low-pressure plasma enhanced chemical vapor deposition technology.Hydrogen atomic content and network structure of GDP thin-film are characterized by element analysis and Fourier transform infrared spectrum.The hardness and modulus of GDP coating are measured by nanoindentation.It is found that when working pressure and flux ratio between T2B and H2 gradually dec...
Keywords:Fourier transform infrared spectrum  nanoindentation  Young's modulus  hardness  
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