Ti-B-C-N纳米复合薄膜结构及力学性能研究

利用反应磁控溅射方法在单晶硅和高速钢(W18Cr4V)基片上制备出不同C含量Ti-B-C-N纳米复合薄膜. 使用X射线衍射和高分辨透射电子显微镜研究了Ti-B-C-N纳米复合薄膜的组织和微观结构,用纳米压痕仪测试了它们的硬度和弹性模量. 结果表明,利用往真空室通入C₂H₂气体的方法制备得到的Ti-B-C-N纳米复合薄膜中,在所研究成分范围内只发现TiN基的纳米晶. 当C₂H₂流量较小时,C元素的加入可以促进Ti-B-C 关键词： Ti-B-C-N薄膜 磁控溅射 微观结构 力学性能

Microstructure and mechanical properties of Ti-B-C-N nanocomposite coatings

Ti-B-C-N nanocomposite coatings with different C quantities are deposited on Si(100) and high speed steel (W18Cr4V) substrates by the closed-field unbalanced reactive magnetron sputtering in the mixture of argon, nitrogen and acetylene gases. The microstructures of Ti-B-C-N nanocomposite coatings are characterized by X-ray diffraction and high-resolution transmission electron microscopy; while the nanohardness and elastic modulus values are measured by the nano-indention method. The results indicate that in the studied composition range, the deposited Ti-B-C-N nanocomposite coatings are found still only in the TiN base nanocrystalline. When the C₂H₂ flux is small, adding C can promote crystallization of Ti-B-C-N nanocomposite coatings, and the grain can be increased to improve the mechanical properties, when the grain size of about 6 nm (C₂H₂ flux rate 2 cm³/min), hardness, elastic modulus and fracture toughness of Ti-B-C-N nanocomposite coatings achieve the maximum, respectively, 35.7 GPa, 363.1 GPa and 2.46 MPa ·m^1/2; the further increase of the C content of Ti-B-C-N nanocomposite coating can reduce mechanical properties of coating dramatically.