激光驻波场中钠原子沉积图样的理论研究

原子在近共振激光驻波场中受光的作用力汇聚沉积，形成以激光半波长为周期的光栅结构. 利用半经典模型对钠原子束在不饱和驻波场中的运动行为进行了理论研究，用数值方法模拟出在考虑横向温度、纵向速度和自由飞程后钠原子沉积的光栅结构，通过半高宽、对比度对最终沉积图样进行表征，分析了这些因素对沉积的影响，为正在开展的原子光刻实验提供了必要的理论依据. 关键词： 原子沉积 半经典模型 激光驻波场

Simulation of sodium atom deposition pattern in a laser standing wave field

A grating structure with the period of half of the laser wavelength is formed by focusing the atoms with a nearly resonant laser standing wave field. The motion of sodium atoms traversing an unsaturated potential are studied by the semi-classical approximation. The structures of gratings under various conditions were simulated using numerical method. By characterizing the grating with FWHM and contrast, the influence of some factors, such as the transverse temperature, the longitudinal velocity, and the free flight to the atom deposition are analysed. Our work provides a theoretical basis to the ongoing atom lithography experiment.