| 波导耦合纳米光栅结构的光学滤波和角分辨调谐特性 |
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| 引用本文： | 宋娇阳,冯胜飞,张新平,刘红梅,宋晏蓉.波导耦合纳米光栅结构的光学滤波和角分辨调谐特性[J].物理学报,2009,58(9):6542-6548. |
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| 作者姓名： | 宋娇阳 冯胜飞 张新平 刘红梅 宋晏蓉 |
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| 作者单位： | 北京工业大学应用数理学院，北京 100124 |
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| 基金项目： | 国家高技术研究发展计划（863计划）（批准号:2007AA03Z306）, 国家自然科学基金（批准号:10774011）, 北京市教育委员会科技计划重点项目（批准号:KZ200810005004）, 北京工业大学固体微结构与性能研究所开放课题（批准号:BJUT-GTS200704）资助的课题. |
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| 摘 要： | 利用干涉光刻技术制备了波导耦合纳米光栅结构，系统研究了其波导共振模式的角分辨调谐特性及其对光栅参数、入射光偏振特性的依赖关系，并作了相应的理论模拟.特别研究了光栅周期和厚度对波导共振模式角分辨调谐速率的影响.实验结果对于器件进一步应用于滤波、生物传感技术具有重要的指导意义.
关键词：
波导耦合光栅
干涉光刻
角分辨
调谐速率
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| 关 键 词： | 波导耦合光栅 干涉光刻 角分辨 调谐速率 |
| 收稿时间： | 2008-06-19 |
Optical filtering and angle-resolved tuning properties of the waveguided grating structures |
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| Song Jiao-Yang,Feng Sheng-Fei,Zhang Xin-Ping,Liu Hong-Mei,Song Yan-Rong.Optical filtering and angle-resolved tuning properties of the waveguided grating structures[J].Acta Physica Sinica,2009,58(9):6542-6548. |
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| Authors: | Song Jiao-Yang Feng Sheng-Fei Zhang Xin-Ping Liu Hong-Mei Song Yan-Rong |
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| Abstract: | Waveguided grating structures were fabricated using interference lithography. The angle resolved tuning properties of the resonant waveguide mode and its dependence on the grating parameters and on the polarization properties of the incident light were investigated. In particular, the influence of the grating period and waveguide thickness on the tuning rate of the resonance waveguide mode was charatcerized. Theoretical simulation showed good agreement with the experimental results, which is important for futher applications of the waveguided grating device in filters and sensors. |
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| Keywords: | waveguided grating structures interference lithography angle resolved tuning rate |
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