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激光驻波场中Cr原子运动轨迹与汇聚沉积的分析
引用本文:郑春兰,李同保,马艳,马珊珊,张宝武.激光驻波场中Cr原子运动轨迹与汇聚沉积的分析[J].物理学报,2006,55(9):4528-4534.
作者姓名:郑春兰  李同保  马艳  马珊珊  张宝武
作者单位:同济大学物理系,上海 200092
摘    要:利用半经典模型,从铬原子在激光驻波场中的运动方程出发,通过数值解方法模拟了铬原子在驻波场中的运动轨迹,并分析了原子的纵向速度分布和准直程度及球差对沉积条纹结构的影响,同时也讨论了基片摆放位置对沉积条纹结构的影响,并通过实验得到了纳米光栅条纹结构. 关键词: 激光驻波场 原子沉积 运动轨迹 沉积分布

关 键 词:激光驻波场  原子沉积  运动轨迹  沉积分布
文章编号:1000-3290/2006/55(09)/4528-07
收稿时间:12 14 2005 12:00AM
修稿时间:2/6/2006 12:00:00 AM

Analysis of Cr atom trajectory and focusing deposition in the standing wave field
Zheng Chun-Lan,Li Tong-Bao,Ma Yan,Ma Shan-Shan,Zhang Bao-Wu.Analysis of Cr atom trajectory and focusing deposition in the standing wave field[J].Acta Physica Sinica,2006,55(9):4528-4534.
Authors:Zheng Chun-Lan  Li Tong-Bao  Ma Yan  Ma Shan-Shan  Zhang Bao-Wu
Institution:Department of Physics, Tongji University, Shanghai 200092, Chiru
Abstract:The laser-focused atomic deposition is a new way to build the nano transfer standard of high reliability adequate for application. Based on the semi-classical model, this paper starts from the motion equation of chromium atom in the laser standing wave field to get the trajectory of the atoms in the standing wave field by analytical simulation. The effects on focal line features are discussed as a result of the angular collimation, velocity spread in the atomic beam and the spherical aberration. The effects from different deposition positions are also discussed. This paper also gives a sample of the grating structure nanofabricated by laser focusing of Cr atoms.
Keywords:laser standing wave field  atomic deposition  motion trajectory  deposition diffusion
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