真空热退火温度对单相Ag2O薄膜微结构和光学性质的影响

利用直流磁控反应溅射技术在玻璃衬底上沉积了单相Ag₂O薄膜,并采用真空热退火对单相Ag₂O薄膜在不同热退火温度 (T _{A) 下进行了1 h热处理.利用X射线衍射谱、扫描电子显微镜和分光光度计研究了 T A对单相Ag2O薄膜微结构和光学性质的影响.研究结果表明, T}A= 300 ℃ 时Ag₂O薄膜中开始出现Ag纳米颗粒,且随着 T _{A的升高薄膜中Ag的含量 关键词： 2}O薄膜')" href="#">Ag₂O薄膜 热退火温度 微结构 光学性质

Effect of vacuum thermal-annealing temperatures on the microstructure and optical properties of single-phased Ag2O film

A single-phased Ag₂O film was deposited on glass substrate by direct-current reactive magnetron sputtering, and was then vacuum thermally annealed at different annealing temperatures (T _{A) for 1 hour. Effect of the T}Aon the films microstructure and optical properties was investigated by X-ray diffractometry, scanning electron microscopy and spectrophotometry. The results indicate that Ag nano-scaled particles begin to appear in the annealed Ag₂O film at TA= 300 ℃. The Ag content obviously increases with increasing TA, and in particular, Ag₂O phase is completely transformed into Ag at T _{A = 475 ℃. The evolution of the films surface morphology from dense to loose indicates that the diffusion and escape of O atoms from film surface accompanied the thermal decomposition reaction of Ag2O to Ag particles during the vacuum thermal annealing. The changes of the films transmissivity, reflectivity and absorptivity with T A are attributed to the thermal decomposition of Ag2O and the films structure evolution during annealing.}