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楔形Al薄膜的物理特性
引用本文:陶向明,劳燕锋,叶全林,金进生,焦正宽,叶高翔.楔形Al薄膜的物理特性[J].物理学报,2001,50(10):1991-1995.
作者姓名:陶向明  劳燕锋  叶全林  金进生  焦正宽  叶高翔
作者单位:浙江大学物理系,杭州310028
基金项目:国家自然科学基金(批准号:19874016)资助的课题.
摘    要:采用真空蒸镀方法,利用液体衬底在沉积过程中的扩散,形成了沉积在玻璃表面的楔形铝薄膜,并研究了它的结构和I-V特性.实验表明,楔形铝薄膜的斜率仅10-6—10-7,具有与一般非平整薄膜不同的I-V特性,其非平整效应不能用普通的非平整薄膜的RRN理论模型来解释. 关键词: 楔形铝薄膜

关 键 词:楔形铝薄膜
收稿时间:2001-03-12
修稿时间:2001年3月12日

PHYSICAL PROPERTIES OF WEDGE-SHAPED Al THIN FILM
TAO XIANG-MING,LAO YAN-FENG,YE QUAN-LIN,JIN JIN-SHENG,JIAO ZHENG-KUAN and YE GAO-XIANG.PHYSICAL PROPERTIES OF WEDGE-SHAPED Al THIN FILM[J].Acta Physica Sinica,2001,50(10):1991-1995.
Authors:TAO XIANG-MING  LAO YAN-FENG  YE QUAN-LIN  JIN JIN-SHENG  JIAO ZHENG-KUAN and YE GAO-XIANG
Abstract:A wedge-shaped aluminum thin film system, deposited on glass surfaces by a vapor deposition method, has been fabricated. By using the expansive and movable behaviours of silicone oil drops, the Al films are quenched gradually by the silicone oil during the deposition process. An anomalous wedge-shaped structure with a slope of 10-6—10-7 spontaneously forms. The I-V characteristic of the system has been studied and its rough effect cannot be interpreted as RRN model of the normal rough thin films.
Keywords:wedge-shaped aluminum thin film
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