FeCoBSiO2磁性纳米颗粒膜的微波电磁特性

采用交替沉积磁控溅射工艺制备了超薄多层的FeCoBSiO2磁性纳米颗粒膜.利用x射线衍射仪、扫描探针显微镜、透射电子显微镜分析了薄膜的微结构和形貌特征.采用振动样品磁强计、四探针法、微波矢量分析仪及谐振腔法测量薄膜试样的磁电性能和微波复磁导率.重点对SiO2介质相含量、薄膜微结构对电磁性能产生重要影响的机理做了分析和探讨.结果 表明：这类FeCoBSiO2磁性纳米颗粒膜具有良好的软磁性能和高频电磁性能，2GHz时的 磁导率μ′高于70，可以应用于高频微磁器件或微波吸收材料的设计. 关键词： 磁性纳米颗粒膜 高频特性 复磁导率 磁控溅射

Microwave electromagnetic characteristics of FeCoBSiO2 nano-granular magnetic films

FeCoBSiO2 nano-granular films were fabricated by alternately deposited mu ltilayers using radio frequency magnetron sputtering. Microstructures and morpho logy were analyzed by x-ray diffraction, scanning probe microscope and transmis sionelectron microscope.Magnetic parameters were measured by vibrating sample magnetometer.The electrical resistivity was measured by a direct current four probe method,and the complex permeability was measured by microwave resonance cavity.The mechanism of the effect of microstructures and content of SiO2 on electromagnetic characteristics was also discussed. Results show that these films have good performance at high frequencies.μ′can be larger than 70 at 2GHz.Thus,the films may be applied to the micromagnetic devices or microwave absorbers in the GHz range.