高温退火后非掺杂磷化铟材料的电子辐照缺陷

对不同气氛下高温退火非掺杂磷化铟(InP)材料的电子辐照缺陷进行了研究. 除铁受主外，磷化铁(FeP₂)气氛下退火后的InP中辐照前没有深能级缺陷，而辐照后样品的热激电流谱(TSC)中出现了5个较为明显的缺陷峰，对应的激活能分别为0.23 eV, 0.26 eV, 0.31 eV, 0.37 eV和0.46 eV. 磷(P)气氛下退火后InP中的热生缺陷较多，电子辐照后形成的缺陷具有复合体特征. 与辐照前相比，辐照后样品的载流子浓度和迁移率产生显著变化. 在同样的条件下，经FeP₂ 气氛下高温退火后的InP样品的辐照缺陷恢复速度较快. 根据这些现象分析了缺陷的属性、快速恢复机理和缺陷对材料电学性质的影响. 关键词： 磷化铟 电子辐照 缺陷

Electron irradiation induced defects in high temperature annealed InP single crystal

Electron irradiation induced defects in InP material which has been formed by high temperature annealing undoped InP in different atmosphere have been studied in this paper.In addition to Fe acceptor,there is no obvious defect peak in the sample before irradiation,whereas five defect peaks with activation energies of 0.23 eV,0.26 eV,0.31 eV,0.37 eV and 0.46 eV have been detected after irradiation.InP annealed in P ambient has more thermally induced defects,and the defects induced by electron irradiation have characteristics of complex defect.After irradiation,carrier concentration and mobility of the samples have suffered obvious changes.Under the same condition,electron irradiation induced defects have fast recovery behavior in the FeP_2 ambient annealed InP.The nature of defects,as well as their recovery mechanism and influence on material property have been discussed from the results.