| 氟化物材料在深紫外波段的光学常数 |
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| 引用本文： | 薛春荣,易葵,齐红基,邵建达,范正修.氟化物材料在深紫外波段的光学常数[J].物理学报,2009,58(7):5035-5040. |
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| 作者姓名： | 薛春荣 易葵 齐红基 邵建达 范正修 |
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| 作者单位： | (1)常熟理工学院江苏新型功能材料实验室，常熟 215500；中国科学院上海光学精密机械研究所，上海 201800；中国科学技术大学国家同步辐射实验室，合肥 230029; (2)中国科学院上海光学精密机械研究所，上海 201800 |
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| 基金项目： | 国家自然科学基金（批准号：60678004）资助的课题. |
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| 摘 要： | 研究了紫外领域常用的6种大带隙的氟化物薄膜材料，在氟化镁单晶基底上用热舟蒸发镀制了三种高折射率材料薄膜LaF3，NdF3，GdF3和三种低折射率材料薄膜MgF2，AlF3，Na3AlF6；用商用lambda900光谱仪测量了它们在190—500 nm范围的透射率光谱曲线；用包络法研究了它们的折射率和消光系数，研究了影响透射率和光学常数的主要因素，给出了6
关键词：
光学常数
包络法
氟化物材料
深紫外
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| 关 键 词： | 光学常数 包络法 氟化物材料 深紫外 |
| 收稿时间： | 2008-05-27 |
Optical constants of fluoride films in the DUV range |
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| Xue Chun-Rong,Yi Kui,Qi Hong-Ji,Shao Jian-Da,Fan Zheng-Xiu.Optical constants of fluoride films in the DUV range[J].Acta Physica Sinica,2009,58(7):5035-5040. |
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| Authors: | Xue Chun-Rong Yi Kui Qi Hong-Ji Shao Jian-Da Fan Zheng-Xiu |
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| Abstract: | High-refractive-index materials such as LaF3, NdF3 and GdF3 and low-refractive-index materials such as MgF2, AlF3 and Na3AlF6 single thin films are deposited by a resistive-heating boat at different deposited rates and specific substrate temperatures on single crystal MgF2 substrate. Transmittances of all fluoride thin films are measured through commercial spectrometer in the ambient atmosphere. Optical constants of these films are determined by the envelope method and the factors effecting optical constants are studied. Result of this work may play an important role in the design and manufacture of cost-effective, mechanically and optically stable optical coatings for the VUV region. |
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| Keywords: | optical constants envelope method fluoride materials deep ultraviolet |
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