| 超导纳米线单光子探测器 |
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| 引用本文： | 张蜡宝,康琳,陈健,赵清源,郏涛,许伟伟,曹春海,金飚兵,吴培亨.超导纳米线单光子探测器[J].物理学报,2011,60(3):38501-038501. |
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| 作者姓名： | 张蜡宝 康琳 陈健 赵清源 郏涛 许伟伟 曹春海 金飚兵 吴培亨 |
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| 作者单位： | 南京大学电子科学与工程学院超导电子学研究所,南京 210093 |
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| 基金项目： | 国家重点基础研究发展计划(批准号:2011CBA00200,2007CB310404)和国家自然科学基金(批准号:10874074)资助的课题. |
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| 摘 要： | 利用磁控溅射、电子束光刻和反应离子刻蚀等微加工技术,开展了超导纳米线单光子探测器(SNSPD)的研究.通过对SNSPD的设计和制备工艺参数的优化,成功制备出了高质量的SNSPD.单光子检测实验表明,制备的SNSPD对660 nm波长的光信号,系统检测效率可达30%,对1550 nm波长光信号,最大系统检测效率为4.2%.在平均暗计数小于10 c/s的情况下,系统检测效率大于20%(660 nm)和3%(1550 nm).
关键词：
单光子
氮化铌
纳米线
探测器
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| 关 键 词： | 单光子 氮化铌 纳米线 探测器 |
| 收稿时间： | 2010-05-15 |
| 修稿时间： | 6/6/2010 12:00:00 AM |
Fabrication of superconducting nanowire single-photon detector |
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| Zhang La-Bao,Kang Lin,Chen Jian,Zhao Qing-Yuan,Jia Tao,Xu Wei-Wei,Cao Chun-Hai,Jin Biao-Bing,Wu Pei-Heng.Fabrication of superconducting nanowire single-photon detector[J].Acta Physica Sinica,2011,60(3):38501-038501. |
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| Authors: | Zhang La-Bao Kang Lin Chen Jian Zhao Qing-Yuan Jia Tao Xu Wei-Wei Cao Chun-Hai Jin Biao-Bing Wu Pei-Heng |
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| Institution: | Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China;Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China;Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China;Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China;Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China;Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China;Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China;Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China;Department of Electronic Science and Engineering of Nanjing University,Nanjing 210093,China |
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| Abstract: | In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4.2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s,the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods. |
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| Keywords: | single photon niobium nitride nanowire detector |
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