声空化物理化学综合法制备发光多孔硅薄膜的微结构与发光特性

声空化所引发的特殊的物理、化学环境为制备高效发光的多孔硅薄膜提供了一条重要的途径.实验结果表明，声化学处理对于改善多孔硅的微结构，提高发光效率和发光稳定性都是一项非常有效的技术.超声波加强阳极电化学腐蚀制备发光多孔硅薄膜，比目前通用的常规方法制备的样品显示出更优良的性质.这种超声的化学效应源于声空化，即腐蚀液中气泡的形成、生长和急剧崩溃，在多孔硅的腐蚀过程中，孔中的氢气泡，由于超声波的作用增加了逸出比率和塌缩，有利于孔沿垂直方向的腐蚀. 关键词： 声空化方法 微结构 发光特性 多孔硅

The microstructure and characteristics of luminescent porous silicon film prepared by the physicochemical sonic-vacating method

The special physicochemical environment caused by sonic_vacating provides an important outlet for the preparation of highly efficient luminescent porous silicon films.Experimental results show that sonic_chemical treatment is an effective t echnology for the improvement of the microstructure of porous silicon,and the luminescent efficiency and stability thereof.Luminescent porous silicon films,prep ared by ultrasonic-enhanced anode electrochemical etching,display better qualiti es than the samples prepared by conventionai methods widely used at present.This ultrasonic_chemical effect roots in sonic_vacating,i.e. the generation,formatio n and rapid collapse of bubbles in the etching solution.In the process of the po rous silicon being etched,the escape rate and caving_in of hydrogen bubbles in t he pores is increased as a result of the work of the ultrasonic waves,which is h elpful to the vertical etching of the pores.