| a-Si在不同衬底材料表面凝聚和生长的状况 |
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| 引用本文： | 王志超,宋杰.a-Si在不同衬底材料表面凝聚和生长的状况[J].物理学报,1987,36(1):17-23. |
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| 作者姓名： | 王志超 宋杰 |
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| 作者单位： | (1)广播电视部广播科学研究所; (2)南京大学物理系 |
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| 摘 要： | 本文报道了应用SEM观察a-Si在不同衬底材料表面凝聚和生长的状况,并对有关现象作了相应的解释。
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| 收稿时间： | 1985-11-01 |
THE CONDITIONS OF CONDENSATION AND GROWTH OF a-Si FILMS ON VARIOUS SUBSTRATE MATERIAL SURFACE |
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| WANG ZHI-CHAO and SONG JIE.THE CONDITIONS OF CONDENSATION AND GROWTH OF a-Si FILMS ON VARIOUS SUBSTRATE MATERIAL SURFACE[J].Acta Physica Sinica,1987,36(1):17-23. |
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| Authors: | WANG ZHI-CHAO and SONG JIE |
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| Abstract: | In this paper, we report the observed conditions of condensation and growth of a-Si on different kinds of substrate materials surfaces studied with the SEM technology. Explanations about the phenomena are given. |
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