| 薄膜应力测定的X射线掠射法 |
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| 引用本文： | 徐可为,高润生,于利根,何家文.薄膜应力测定的X射线掠射法[J].物理学报,1994,43(8):1295-1300. |
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| 作者姓名： | 徐可为 高润生 于利根 何家文 |
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| 作者单位： | 西安交通大学金属材料强度国家重点实验室 |
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| 基金项目： | 国家自然科学基金资助的课题. |
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| 摘 要： | 薄膜应力可用ｘ射线掠射法测量，２θ－ｓｉｎ2φ失去线性时，采用小角掠射，有可能使２θ－ｓｉｎ2φ恢复直线，并由斜率计算应力；２θ－ｓｉｎ2φ维持线性时，依次改变掠射角，可望对内应力沿膜厚分布做出评估。
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| 关 键 词： | 薄膜 应力测定 X射线掠射 掠射 |
| 收稿时间： | 9/2/1993 12:00:00 AM |
THIN FILM STRESS EVALUATION BY A GLANCING X-RAY BEAM |
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| XU KE-WEI,GAO RUN-SHENG,YU LI-GEN and HE JIA-WEN.THIN FILM STRESS EVALUATION BY A GLANCING X-RAY BEAM[J].Acta Physica Sinica,1994,43(8):1295-1300. |
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| Authors: | XU KE-WEI GAO RUN-SHENG YU LI-GEN and HE JIA-WEN |
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| Abstract: | A new method with a glancing X-ray beam projected onto the sample is proposed for internal stress measurement in thin films. The curvature in 2θ versus sin2φ plot will be eliminated as the glancing angle is small enough, and the stress can be calculated in terms of the linear slope. With this method, it appears to be promise to evaluate stress distribution through the film depth as the glancing angle is changed step by step. |
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