| 溶胶-凝胶法制备Sr2Bi4Ti5O18薄膜及其铁电性能研究 |
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| 引用本文： | 方 洪,孙 慧,朱 骏,毛翔宇,陈小兵.溶胶-凝胶法制备Sr2Bi4Ti5O18薄膜及其铁电性能研究[J].物理学报,2006,55(6):3086-3090. |
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| 作者姓名： | 方 洪 孙 慧 朱 骏 毛翔宇 陈小兵 |
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| 作者单位： | (1)扬州大学物理科学与技术学院,扬州 225002; (2)扬州大学物理科学与技术学院,扬州 225002;南京大学固体微结构物理实验室,南京 210008 |
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| 基金项目： | 国家自然科学基金(批准号:10274066)资助的课题. |
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| 摘 要： | 采用溶胶-凝胶法,在氧气氛中和层层晶化的工艺条件下,成功地制备了沉积在Pt/Ti/SiO2/Si(100)衬底上的铁电性能优良的Sr2Bi4Ti5O18 (SBTi)薄膜,并研究了SBTi薄膜的微结构、表面形貌、铁电性能和疲劳特性.研究表明：薄膜具有单一的层状钙钛矿结构，且为随机取向；薄膜表面光滑，无裂纹，厚度约为725nm；铁电性能测试显示较饱和、方形的电滞回线，当外电场强度为275kV/cm时
关键词：
溶胶-凝胶法
铁电薄膜
2Bi4Ti5O18')" href="#">Sr2Bi4Ti5O18
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| 关 键 词： | 溶胶-凝胶法 铁电薄膜 Sr2Bi4Ti5O18 |
| 文章编号： | 1000-3290/2006/55（06）/3086-05 |
| 收稿时间： | 09 19 2005 12:00AM |
| 修稿时间： | 2005-09-192005-12-11 |
Ferroelectric properties of Sr2Bi4Ti5O18 thin films prepared by sol-gel method |
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| Fang Hong,Sun Hui,Zhu Jun,Mao Xiang-Yu and Chen Xiao-Bing.Ferroelectric properties of Sr2Bi4Ti5O18 thin films prepared by sol-gel method[J].Acta Physica Sinica,2006,55(6):3086-3090. |
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| Authors: | Fang Hong Sun Hui Zhu Jun Mao Xiang-Yu and Chen Xiao-Bing |
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| Abstract: | High quality Sr2Bi4Ti5O18 (SBTi) ferroelectric thin films on Pt/Ti/SiO2/Si(100) substrates were successfully prepared using the sol-gel method.The microstructure, ferroelectric properties and fatigue characteristics of SBTi thin films were investigated.The results show that the films with smooth surface are of single phase of SBTi and randomly oriented. The well-saturated ferroelectric hysteresis loops and the fatigue properties were obtained by hysteresis measurements using a metal-ferroelectric-metal structure. The remnant polarization (2Pr) and coercive field (2Ec) reached to 24.0μC/cm2 and 137.8kV/cm, respectcively in the electric field of 275kV/cm. No fatigue was observed up to 4.4×1010 switching cycles. |
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| Keywords: | Sol-Gel ferroelectric thin film Sr2Bi4Ti5O18 |
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