| SiO2脊形条波导热极化引起的电光效应 |
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| 引用本文： | 曹 霞,秦海燕,成丽华.SiO2脊形条波导热极化引起的电光效应[J].物理学报,2006,55(10):5283-5287. |
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| 作者姓名： | 曹 霞 秦海燕 成丽华 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室，杭州 310027 |
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| 基金项目： | 国家自然科学基金(批准号：60377022, 60408001)和教育部留学回国人员科研启动基金资助的课题. |
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| 摘 要： | 通过理论模拟对具有上覆盖层的SiO2脊形条波导结构进行了优化，在此基础上利用微电子工艺制作了SiO2脊形波导Mach-Zehnder型电光调制器，并进行热极化引起的电光和非线性效应的研究.热极化过程大幅增强了样品的电光及非线性效应，二次电光系数由热极化前的1.56×10-22(m/V)2提高到热极化后的8.50×10-22(m/V)2，极化后得到了0.093pm/V的线性电光系数，对热极化的物理机理进行了理论分析.
关键词：
电光调制器
2光波导')" href="#">SiO2光波导
电光效应
热极化
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| 关 键 词： | 电光调制器 SiO2光波导 电光效应 热极化 |
| 收稿时间： | 11 29 2005 12:00AM |
| 修稿时间： | 2005-11-292006-03-15 |
Electro-optic effect induced by thermal poling in SiO2 ridge waveguides |
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| Cao Xi,Qin Hai-Yan and Cheng Li-Hua.Electro-optic effect induced by thermal poling in SiO2 ridge waveguides[J].Acta Physica Sinica,2006,55(10):5283-5287. |
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| Authors: | Cao Xi Qin Hai-Yan and Cheng Li-Hua |
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| Abstract: | The structure of silica ridge waveguides with upper-cladding is optimized by theoretical simulation. Based on this design, a Mach-Zehnder electro-optic modulator is fabricated by micro-electronics techniques, which is used for the study of electro-optic effect and nonlinear effect induced by thermal poling. The nonlinear effects in silica are improved after thermal poling, with 0.093pm/V and 8.50×10-22(m/V)2 achieved in the experiment for linear electro-optic coefficient and second-order electro-optic coefficient，respectively. The physical mechanism of the enhancement of nonlinear effects in silica by thermal poling is also analyzed theoretically. |
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| Keywords: | electro-optic modulator SiO2 waveguide electro-optic effect thermal poling |
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