|
|||||
|
|
| 射频放电阻抗测量用于等离子体诊断研究 | |
| 引用本文： | 黄建军,余建华,D.Teune.射频放电阻抗测量用于等离子体诊断研究[J].物理学报,2001,50(12):2403-2407. |
| 作者姓名： | 黄建军 余建华 D.Teune |
| 作者单位： | 1. 深圳大学理学院实验中心,深圳,518060 2. 深圳大学光电子系,深圳,518060 3. 德国鲁尔大学电子工程与信息技术系,波鸿,D-44780,德国 |
| 基金项目： | 广东省自然科学基金(批准号:980922)资助的课题. |
| 摘 要： | 利用自行研制的传感器和测量装置,通过对射频放电电压、电流以及其相位角的精确测定,算出放电管的总阻抗,结合放电管的等效电路模型与Godyak等建立的射频放电模型,对射频激励铜离子激光管在氦气中的放电特性进行了研究,得出射频激励铜离子激光器不同气压及电流密度下的等离子体电阻、容抗、鞘层厚度及电子密度
关键词：
射频放电
阻抗测量
等离子体诊断 |
| 关 键 词： | 射频放电 阻抗测量 等离子体诊断 |
| 文章编号： | 1000-3290/2001/50(12)2403-05 |
| 收稿时间： | 2001-02-25 |
| 修稿时间： | 6/9/2001 12:00:00 AM |
PLASMA DIAGNOSIS OF RF DISCHARGE BY USING IMPEDANCE MEASUREMENT |
|
| HUANG JIAN-JUN,YU JIAN-HUA and D. TEUNER.PLASMA DIAGNOSIS OF RF DISCHARGE BY USING IMPEDANCE MEASUREMENT[J].Acta Physica Sinica,2001,50(12):2403-2407. | |
| Authors: | HUANG JIAN-JUN YU JIAN-HUA and D TEUNER |
| Abstract: | It is presented in this paper that the method known from network analysis with home-made probe and experimental setup to measure current, voltage and phase angle of RF discharge in He gas more accurately. The sheath thickness and the real and imaginary parts of the plasma impedance were obtained by using the equivalent circuit model and taking account stray capacitances of the set-up. In addition, making use of Godyak′s RF discharge simple model, the electron density in the discharge was calculated at different pressure and current density. |
| Keywords: | RF discharge impedance measurement plasma diagnosis |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |
| 点击此处可从《物理学报》浏览原始摘要信息 | |
| 点击此处可从《物理学报》下载免费的PDF全文 | |