亚微米结构的可见光聚合全息制作

报道用激光全息技术结合可见光光聚合制作周期结构的方法和物理机理;对多束激光相干产生的空间干涉光场进行了讨论;提供了一组激光束的偏振态的最佳组合,使激光全息技术制作理想的亚微米单晶结构更有效和快捷.分析了曝光量与制作效果的关系,此法可实现小球自排无法实现的大幅度占空比调节.与紫外光光聚合相比,可见光光聚合可在监视下调节,操作方便安全. 关键词： 激光全息技术 光学晶格 光子晶体

Microfabrication of crystalline structures by holographic lithography combined with visible light photopolymerization

A microfabrication of periodic structures by holographic lithography technology combined with the visible laser-induced photopolymerization is developed in this paper. The physical mechanism about the interference of laser beams and the angles between the beams is discussed; and an optimal combination of polarizations of laser beams is reported. Also the occupation fraction can be adjusted in a large range, and the experimental results show that the holographic lithography technology combined with the visible laser-induced photopolymerization is an effective method for fabrication of sub-micrometer periodic structures.