| a-Si3N4纳米粒子的激光法制备及能级结构研究 |
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| 引用本文： | 王善忠,李道火.a-Si3N4纳米粒子的激光法制备及能级结构研究[J].物理学报,1994,43(4):627-631. |
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| 作者姓名： | 王善忠 李道火 |
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| 作者单位： | (1)中国科学技术大学结构分析开放实验室,合肥230026; (2)中国科学院安徽光学精密机械研究所,合肥230031 |
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| 基金项目： | 国家高技术研究发展计划和中国科学院七五计划、八五计划重点攻关项目资助的课题. |
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| 摘 要： | 给出激光化学汽相沉积法制备a-Si3N4纳米粒子的原理和经验公式,在特定工艺参数下获得平均粒径为6.5nm的优质a-Si3N4纳米粒子,用紫外光谱研究其能级结构,发现与小粒子有关的峰状光谱结构和能带分裂现象,描述了a-Si3N4纳米粒子的物理结构图象,确认硅错键≡Si—Si≡,硅悬挂键≡Si30在富硅a-Si3
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| 关 键 词： | 氮化硅 纳米粒子 激光淀积 能级 |
| 收稿时间： | 1993-05-31 |
A STUDY ON LASER-PREPARATION AND ENERGY- LEVEL STRUCTURE OF NANOMETER SIZED a-Si3N4 PARTICLES |
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| WANG SHAN-ZHONG and LI DAO-HUO.A STUDY ON LASER-PREPARATION AND ENERGY- LEVEL STRUCTURE OF NANOMETER SIZED a-Si3N4 PARTICLES[J].Acta Physica Sinica,1994,43(4):627-631. |
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| Authors: | WANG SHAN-ZHONG and LI DAO-HUO |
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| Abstract: | In this paper, we give the principle and the empirical formulas of the preparation for nanometer sized a-Si3N4 particles by laser induced chemical vapor deposition (LICVD). Under certain technological parameters, our experiments have obtained high quality nanometer a-Si3N4 particles whose average diameter is 6.5nm. We disperse these particles in organic solvent so as to study its energy level structure with ultravolet-visible spectrum. The photoluminescent experiments show its peak-like spectrum structure and the splitting of energy band, which relate to super micro-particles. We also describe the picture of the physical structure of nanometer a-Si3N4 particles and demonstrate that silicon"wrong bond"≡Si-Si≡and silicon dangling bond≡Si30 play a dominant role in the spectrum character for Si-riched nanometer a-Si3N4 particle. |
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