| C3N4薄膜的结构与性能研究 |
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| 引用本文： | 吴大维,何孟兵,郭怀喜,罗海林,张志宏,傅德君,范湘军.C3N4薄膜的结构与性能研究[J].物理学报,1997,46(3):530-535. |
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| 作者姓名： | 吴大维 何孟兵 郭怀喜 罗海林 张志宏 傅德君 范湘军 |
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| 作者单位： | 武汉大学物理系 |
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| 基金项目： | 国家自然科学基金资助的课题. |
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| 摘 要： | 用射频等离子体增强化学汽相沉积技术合成C3N4薄膜，并采用强迫晶化技术，经透射电子衍射观测，薄膜具有多晶结构．用X射线光电子能谱测试了C，N原子结合能及含氮量．傅里叶变换红外光谱曲线表明薄膜中不含石墨相．测得薄膜的维氏硬度为29.2—50.0GPa
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| 关 键 词： | C3N4 氮化碳 薄膜结构 性能 |
| 收稿时间： | 1996-06-17 |
STRUCTURE AND CHARACTERISTICS OF C3N4 THIN FILMS |
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| WU DA-WEI,HE MENG-BING,GUO HUAI-XI,LUO HAI-LIN,ZHANG ZHI-HONG,FU DE-JUN and FAN XIANG-JUN.STRUCTURE AND CHARACTERISTICS OF C3N4 THIN FILMS[J].Acta Physica Sinica,1997,46(3):530-535. |
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| Authors: | WU DA-WEI HE MENG-BING GUO HUAI-XI LUO HAI-LIN ZHANG ZHI-HONG FU DE-JUN and FAN XIANG-JUN |
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| Abstract: | Nitride carbon thin films have been deposited by plasma-enhanced chemical vapor phase deposition. The results of transmission-electron diffraction indicated that films have polycrystal structures. Carbon and nitrogen atoms binding energies and the nitrogen content of the-films are measured out by X-ray photoelectron spectroscopy.The Fourier transform infrared spectrum show that there is no graphite phase in the films,and the Vickers hardness of the films vary from 29.2 to 50.0GPa. |
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