Co-Zr/Pd多层膜的磁性与结构

Co-Zr/Pd多层膜由高频溅射方法制得．磁性合金Co-Zr层厚度固定为1.8nm，改变Pd层厚度0.5—6nm．由振动样品磁强计测量，发现随Pd层厚度增加，磁化强度发生周期性振荡变化，周期约为1nm，这是由Pd层的极化振荡引起的．经X射线衍射测得Pd层厚度超过1.3nm时，磁性合金Co-Zr层发生晶化，而厚的Co-Zr单层膜是非晶结构．X射线大角衍射图中的超晶格峰表明，在Co-Zr层和Pd层之间存在相关生长．而且还发现，随Pd层厚度增加，样品在垂直膜面方向的晶粒尺寸及fcc（111）面的面间距发生周期性 关键词：

MAGNETIC AND STRUCTURAL PROPERTIES OF Co-Zr/Pd MULTILAYERS

Co-Zr/Pd multilayers were prepared by a radio frequency sputtering method.The thickness of the Co-Zr magnetic layers was fixed at 1.8nm,and the thickness of Pd layers was changed from 0.5 to 6nm.The oscillation of saturation magnetization with a period of about 1nm was obtained as the thickness of Pd layers increased.This can be attributed to the oscillation of the polarization of Pd layers.X-ray diffraction showed that magnetic alloy Co-Zr layers were in a crystalline state when the Pd layers were thicker than 1.3nm though a thick Co-Zr single layer was in an amorphous state.The superlattice peaks in the high angle X-ray diffraction patterns showed that there existed a coherent growth between the Co-Zr layers and Pd layers when the Pd layers were thicker than 1.3nm.Moreover,as the thickness of the Pd layers increased,periodically oscillatory phenomena were found both in the crystalline grain size perpendicular to the film plane and in the interplanar distance of the fcc(111) plane.These phenomena may be related to the oscillatory interlayer coupling between Co-Zr magnetic layers through Pd layers.