Er硅酸盐化合物薄膜的相转变和光致发光特性研究

溶胶-凝胶法在Si(100)基片上旋涂法制备铒硅酸盐化合物（Er silicate）薄膜.系统研究了烧结温度和烧结时间对Er silicate薄膜相结构、相转变以及光致发光特性的影响.在1000 ℃以下，薄膜晶体结构为Er₂O₃ 晶体和SiO₂ 非晶的混合物.随着烧结温度增加到1200 ℃，保温时间增加到30 min，薄膜晶体结构转变成(100),(200)和(300)择优取向的Er₂SiO₅相. 关键词： 发光学 光学薄膜 溶胶-凝胶法 铒硅酸盐

Phase transformation and photoluminescence properties of Er silicate films by sol-gel method

The Er₂SiO₅ films with strong room-temperature photoluminescence have been fabricated by using the sol-gel spin coating method. The effects of sintering temperature and time on phase structure and phase transformation of ErSiO films have been investigated. A mixture of Er₂O₃ crystal and amorphous SiO₂ was obtained below 1000 ℃, and the Er₂SiO₅ phase with high (100), (200), and (300) preferred orientation was detected when the temperature increased to higher than 1200 ℃. The phase structure has an evident influence on the photoluminescence properties for ErSiO films. For the phase structure of Er₂O₃ crystal with amorphous SiO₂, the weak PL spectra with a main peak at λ=1.535 μm were observed. The strongest main PL peak moved to λ=1.528 μm, and the intensity was increased about 10—20 times when the phase structure changed to Er₂SiO₅. The Er₂SiO₅ films with strong room temperature photoluminescence are promising candidates for application in Si-based light source and amplifier.