工作压强对射频辉光放电H2/C4H8等离子状态的影响

利用辉光放电技术采用等离子体质谱诊断的方法研究了不同工作 压强下H₂/C₄H₈混合气体等离子体中 主要正离子成分及其能量的变化规律, 并分析了压强对H₂/C₄H₈混合气体的离解机理以及主要正离子形成过程的影响. 结果表明: 随着工作压强的增加, 碳氢碎片离子的浓度和能量均逐渐减小. 当工作压强为5 Pa时, H₂/C₄H₈混合气体等离子体中C₃H₅⁺相对浓度最大; 压强为10 Pa时, C₃H₃⁺相对浓度最大; 压强为15, 20 Pa时, C₂H₅⁺相对浓度最大; 压强为25 Pa时, C₄H₉⁺相对浓度最大. 对H₂/C₄H₈等离子体中的主要组分及其能量分布所进行的定性分析, 将为H₂/C₄H₈混合气体辉光放电聚合物涂层的工艺参数优化提供参考技术基础. 关键词： 辉光放电技术 等离子体质谱诊断 工作压强

Influence of working pressure on the state of H2/C4H8 glowing discharge plasma

The variations of the main positive ion components and their energies for the plasma of H₂/C₄H₈ gas mixture under different working pressures are investigated using the glow discharge technique and plasma mass spectrometry diagnostic method, and the effects of work pressure on both the dissociation mechanism of the mixed gas H₂/C₄H₈ and the forming process of the main positive are analyzed. The results show that both the intensity and energy of the C-H segment ions in H₂/C₄H₈ plasma decrease with pressure increasing. The relative concentration of m/e 41(C₃H₅⁺) reaches a maximum when work pressure is 5 Pa. And when the pressure is 10 Pa, the relative concentration of m/e 39(C₃H₃⁺) is largest; when the pressures are 15 Pa and 20 Pa, the relative concentration of m/e 29 (C₂H₅⁺) is highest; when the pressure is 25 Pa, the relative concentration of m/e 57(C₄H₉⁺) is biggest. The component and its energy distribution of H₂/C₄H₈ plasma are qualitatively analyzed. The results will serve as a reference to the optimization of parameters for glow plasma polymer coatings.