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溶胶凝胶旋转涂敷技术制备ZnO:In薄膜的结构特性
引用本文:兰伟,刘雪芹,黄春明,唐国梅,杨扬,王印月.溶胶凝胶旋转涂敷技术制备ZnO:In薄膜的结构特性[J].物理学报,2006,55(2):748-752.
作者姓名:兰伟  刘雪芹  黄春明  唐国梅  杨扬  王印月
作者单位:(1)兰州大学物理系,兰州 730000; (2)西北民族大学计算机科学与信息工程学院,兰州 730030
摘    要:采用溶胶凝胶法,结合旋转涂敷技术在石英衬底上制备了210—240nm厚度的ZnO∶In薄膜.使用掠角入射X射线衍射(GI_XRD)、常规X射线衍射、傅里叶变换红外光谱、原子力显微镜、光致发光谱以及不同入射角GI_XRD谱(α=1,2,3和5°)等手段,对不同掺杂浓度的ZnO∶In薄膜进行了结构分析.发现ZnO∶In薄膜内部是由大尺寸(002)晶向的无应力ZnO晶粒堆积而成,而薄膜表面主要是小尺寸的(002)和(103)晶粒,并且适量的In掺杂能有效改善ZnO薄膜内部的晶体结构特性. 关键词: ZnO∶In薄膜 晶体结构 掠角入射X射线衍射 溶胶凝胶法

关 键 词:ZnO∶In薄膜  晶体结构  掠角入射X射线衍射  溶胶凝胶法
文章编号:1000-3290/2006/55(02)/0748-05
收稿时间:2/4/2005 12:00:00 AM
修稿时间:2005-02-042005-06-21

Structural properties of ZnO: In thin films prepared by sol-gel spin-coating technique
Lan Wei,Liu Xue-Qin,Huang Chun-Ming,Tang Guo-Mei,Yang Yang,Wang Yin-Yue.Structural properties of ZnO: In thin films prepared by sol-gel spin-coating technique[J].Acta Physica Sinica,2006,55(2):748-752.
Authors:Lan Wei  Liu Xue-Qin  Huang Chun-Ming  Tang Guo-Mei  Yang Yang  Wang Yin-Yue
Abstract:ZnO∶In thin films with thickness varying in the 210—240nm range were prepared on quartz substrates by sol_gel spin_coating technique. The structural properties of these thin films (In/Zn=0, 1, 2, 3 and 5at%) were studied by grazing incidence X_ray diffraction, conventional X_ray diffraction, Fourier transform infrared spectroscopy, atomic force microscopy and photoluminescence. It is found that the ZnO∶In thin films are composed of the unstressed bulk layer packed up by large grains with (002) plane and the surface layer by small grains with (002) and (103) planes, and a proper In doping concentration can improve structural properties of ZnO thin films. The analytic results were further proved by grazing incidence X_ray diffraction at different incidence angles (α=1, 2, 3 and 5°).
Keywords:ZnO∶In thin films  crystal structure  grazing incidence X_ray diffraction  sol_gel
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